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ALL-METAL VACUUM FURNACE

All-Metal Vacuum Furnace
Mo/W Hot Zone for High Vacuum, H₂ & Low-Contamination Processing

A high-temperature vacuum furnace built around Mo/W refractory-metal hot-zone components for clean thermal processing under high vacuum, inert gas and hydrogen atmospheres. The hot zone, atmosphere control and temperature field are engineered together around the workpiece and process.

Mo / W all-metal hot zone10⁻⁶ Pa class*Vac / N₂ / Ar / H₂Built up to 2600°C
Thermonik ENG all-metal vacuum furnace
ACTUAL EQUIPMENT / METAL FURNACE
* Ultimate pressure and achievable temperature depend on furnace configuration, workpiece and atmosphere.
Mo / WALL-METAL HOT ZONE
10⁻⁶ Pa class*HIGH VACUUM
Vac / N₂ / Ar / H₂ATMOSPHERE CONTROL
R&D → CUSTOMPROCESS-FIRST DESIGN
WHY ALL-METAL?

Why all-metal hot zones are used for clean, high-vacuum and H₂ processing.

Three engineering links connect furnace construction to process performance.

01 / CLEANLINESS

Reduce contamination sources

Configuration
  • Mo/W all-metal hot zone
  • No fibrous insulation in the primary hot-zone structure
→
Effect
  • Reduced particle-generation sources
  • Reduced pathways for carbon and adsorbed moisture
Typical use: high-purity materials / semiconductor pretreatment / joining interfaces
02 / ATMOSPHERE

Control reactive-gas partial pressures

Configuration
  • High-vacuum pumping
  • N₂ / Ar / H₂ atmosphere switching
→
Effect
  • Lower pO₂ and pH₂O
  • Establish reducing conditions with H₂
Typical use: degassing / brazing / metallization pretreatment
03 / TEMPERATURE

Engineer the radiative heat field

Design
  • Heater layout
  • Mo/W radiation shields and fixtures
→
Effect
  • Control in-plane ΔT
  • Reduce warpage, stress and property variation
Typical use: glass / precision-material evaluation / joining

What changes as pressure is reduced?

Theoretical pO₂ values assuming residual gas has the composition of air. Actual residual-gas composition depends on outgassing, leaks, pumping configuration and process history.
10⁻⁴ Pa
pO₂ ≈ 2.1×10⁻⁵ Pa (air-composition assumption)
10⁻⁵ Pa
pO₂ ≈ 2.1×10⁻⁶ Pa (air-composition assumption)
10⁻⁶ Pa
pO₂ ≈ 2.1×10⁻⁷ Pa (air-composition assumption)
In practice: Reducing reactive species such as O₂ and H₂O helps suppress oxidation, adsorbed moisture and unwanted side reactions.

Mo and W are selected by more than melting point.

Hot-zone materials are selected by temperature range, geometry, high-temperature strength, manufacturability and service life.
MOLYBDENUM
~2623°C
  • Radiation shields / structural parts
  • Balance of temperature capability and manufacturability
⇄
TUNGSTEN
~3422°C
  • Higher-temperature heater sections
  • Greater high-temperature margin
Design consideration: Recrystallization, creep and deformation at temperature are considered when selecting material, thickness and support method.
INSIDE THE HOT ZONE

Inside an all-metal hot zone

The actual hot-zone image and key design elements show how the furnace supports clean, high-vacuum, high-temperature processing.

Mo/W all-metal hot zone inside a Thermonik ENG vacuum furnace
1
Mo/W heating elementsHigh-temperature heating under vacuum, inert gas or H₂. Material and geometry are selected for the target temperature.
2
Metal radiation shieldsControl radiative heat loss and the thermal field while reducing heat load to the chamber.
3
Workpiece / fixture zoneTemperature distribution is designed around view factor, support method and thermal mass of the workpiece and fixture.
4
Vacuum / gas systemControls outgassing removal, N₂/Ar/H₂ introduction, pressure sequence and safety interlocks.
Reproducibility is engineered acrossfixture + workpiece + thermal recipe—not only the hot zone itself.
FEATURE → PROCESS → APPLICATION

How furnace features translate into process benefits.

Each furnace feature is linked to a material-process advantage.

FEATUREAll-metal hot zoneReduced particles, outgassing and carbon sources
→
PROCESS EFFECTMaintain clean surfaces and interfacesCreate conditions less sensitive to trace contamination
→
APPLICATIONHigh-purity materials / semiconductor / glassPowders, oxides, nitrides, degassing and surface stabilization
FEATUREVacuum / N₂ / Ar / H₂Control pO₂, pH₂O and reducing potential
→
PROCESS EFFECTOxidation suppression / reduction / degassingReduce effects of oxide films, moisture and unwanted reactions
→
APPLICATIONBrazing / joining / metallization pretreatmentInterface processes for metals, ceramics and glass
FEATUREHeater + shields + fixture + recipeEngineer radiation field and thermal history
→
PROCESS EFFECTControl in-plane ΔT and thermal gradientsReduce warpage, stress and property variation
→
APPLICATIONGlass / precision-material evaluation / large-area workpiecesThermal processes requiring repeatability
APPLICATIONS

Applications

Representative applications where all-metal construction, atmosphere control and thermal-field engineering are important.

▦
SEMICONDUCTOR

Semiconductor packaging processes

Clean pretreatment such as degassing, drying and surface stabilization.

⇄
BRAZING / JOINING

Brazing & joining

Joining of metals, ceramics and glass while suppressing oxidation.

◇
HIGH-PURITY MATERIAL

High-purity material heat treatment & synthesis

Processing of powders, oxides and nitrides where contamination from furnace materials must be minimized.

▱
GLASS / PRECISION

Glass & precision-material evaluation

Thermal processing where temperature distribution, warpage, stress and repeatability are critical.

R&D REPRESENTATIVE SPEC

Representative R&D specification

The following is one R&D configuration. Equipment specifications are engineered from the workpiece, target temperature, atmosphere and required throughput.

Application
Material evaluation / process development (R&D)
Hot zone
140 × 140 × 170 mm
Standard R&D temperature range
Up to ~1800°C
Ultimate vacuum
10⁻⁶ Pa class
Atmosphere
N₂ / Ar / high vacuum / H₂
Heater
Tungsten heating elements
Insulation
Tungsten / molybdenum
Utilities
Electrical power / cooling water / process gases
SAFETYH₂ operating sequencePre-charge purge / leak monitoring / emergency shutoff
ATMOSPHEREVac / N₂ / Ar / H₂Atmosphere exchange and pumping designed around residual O₂ and H₂O
TEMPERATUREΔT / uniformity / cooling gradientOptimized as workpiece + fixture + recipe
SCALER&D → larger / production systemsPower, cooling and vacuum systems are resized for required throughput
MANUFACTURING EXAMPLES

Manufacturing examples

Even within the all-metal furnace category, the design changes with temperature, atmosphere and hot-zone dimensions.

Thermonik ENG R&D all-metal furnace, 2000°C classR&D / 2000°C

R&D all-metal furnace

MAX TEMP.2000°C
VACUUM10⁻⁴ Pa class
ATMOSPHEREVac / N₂ / Ar
ROLEProcess development
Thermonik ENG ultra-high-temperature all-metal furnace, 2600°C build exampleULTRA HIGH TEMP.

Ultra-high-temperature all-metal furnace

Ar2600°C
N₂2400°C
VACUUM2000°C
HOT ZONEφ150 × 200H
Thermonik ENG compact research all-metal furnace, 2400°C build exampleCOMPACT RESEARCH

Compact research all-metal furnace

Ar2400°C
ATMOSPHEREVac / N₂ / Ar / H₂
HOT ZONEW60 × D60 × H75
ROLECompact R&D

Maximum temperature must be specified together with atmosphere.

ARGON2600°C built / demonstrated
NITROGEN2400°C built / demonstrated
VACUUM2000°C built / demonstrated
Achievable conditions depend on atmosphere, hot-zone configuration and workpiece load; the furnace is therefore not specified by maximum temperature alone.
FAQ

Frequently Asked Questions

Key questions commonly discussed during furnace selection.

What is the difference between an all-metal vacuum furnace and a graphite furnace?

An all-metal furnace uses Mo/W hot-zone components to prioritize low outgassing, low particle generation and avoidance of carbon contamination. A graphite furnace uses a graphite hot zone and is better suited to ultra-high temperatures in the 3000°C class.

Why choose an all-metal furnace for high-temperature H₂ processing?

Because the primary hot-zone components do not use carbon materials, it is easier to avoid carbon-derived contamination pathways. This is advantageous for high-purity reducing processes. Component life is evaluated against temperature, H₂ purity and material grade.

Can the furnace operate in hydrogen?

Yes. Systems are engineered around H₂ concentration, temperature, pressure, purge sequence, leak monitoring, interlocks and exhaust treatment.

Does 10⁻⁶ Pa-class vacuum guarantee a fixed cleanliness level?

No. Residual-gas composition depends on outgassing from the workpiece and fixtures, leaks, bakeout conditions, pumping configuration and gas purity.

Is temperature uniformity determined only by the thermal conductivity of Mo/W?

No. At high temperature in high vacuum, radiation is dominant. Heater layout, radiation shields, view factors, fixtures, workpiece thermal mass and the process recipe all matter.

Can you build systems above 1800°C?

Yes. Manufacturing examples include 2600°C in Ar, 2400°C in N₂ and 2000°C under vacuum. Higher-temperature systems are re-engineered with W-dominant hot zones and appropriate temperature-measurement methods.

CONSULTATION

Start with the material, target temperature and atmosphere.

A completed specification is not required. We review the material, target temperature, atmosphere, workpiece size, contamination limits and allowable temperature variation, then define the hot zone, vacuum, gas and safety requirements.

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